1 南方科技大学电子与电气工程系，深圳 518055
2 广东惠伦晶体科技股份有限公司，东莞 523757
为了制备石英晶体谐振器，在石英衬底上采用光刻和电感耦合等离子刻蚀技术制备台阶形貌，研究了制备过程中激励电源功率、偏压电源功率以及导热物质等工艺参数对刻蚀效果的影响。并且利用扫描电子显微镜对刻蚀图形的表面形貌进行了观察，通过实验与分析得到了符合工业生产要求的工艺参数。最后在最优工艺参数条件下，制得了高约22 μm的整齐的台阶形貌，并将干法刻蚀的结果与湿法刻蚀对比，展现了干法刻蚀的特点以及干法刻蚀应用于工业化生产石英晶体谐振器的潜力。
石英晶体 光刻 电感耦合等离子刻蚀 工艺参数 台阶刻蚀 quartz crystal photolithography inductively coupled plasma etching processing parameter step etching
Author Affiliations
Abstract
1 Department of Electronics and Electrical Engineering, Southern University of Science and Technology, Shenzhen 518055, China
2 Key Laboratory of Weak Light Nonlinear Photonics, Ministry of Education, Nankai University, Tianjin 300457, China
A mode field adapter (MFA) fabricated by the thermal expanded core (TEC) technique is investigated. Firstly, the mode field characteristics of the TEC large mode area fiber (LMAF) are analyzed. Compared with the single-mode fiber (SMF), the mode field diameter of the LMAF enlarged slower than that of the SMF. Secondly, the mode field characteristics of the different fibers with TEC treatment are discussed. Thirdly, the transmission efficiency of the MFA fabricated by the SMF and LMAF is also investigated. Finally, we used the 6/125 μm SMF and 15/130 μm LMAF to fabricate an MFA with transmission efficiency of 92% and the handling power as high as 100 W.
060.2340 Fiber optics components 060.2310 Fiber optics 140.3510 Lasers, fiber Chinese Optics Letters
2018, 16(3): 030602
1 Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
2 Key Laboratory of Optical Information Science and Technology, Ministry of Education, Institute of Modern Optics,Nankai University, Tianjin 300071, China
1 Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
2 Key Laboratory of Optical Information Science and Technology, Ministry of Education, Institute of Modern Optics, Nankai University, Tianjin 300071, China
1 苏州大学物理与光电·能源学部, 江苏 苏州 215006
2 焦作师范高等专科学校物理系, 河南 焦作 454003
研究了考虑内禀退相干情况下，两粒子XXZ海森堡系统中量子纠缠在各种外界因素影响下的动态演化规律。研究发现无论系统的初态是否处于最大纠缠态，内禀退相干都会对系统纠缠的含时演化有明显的抑制作用。如果系统的初态为纠缠态|ψ(0)〉=c|01〉+d|10〉，系统的纠缠与各向异性参数和外加磁场没有关系，却受到Dzyaloshinskii-Moriya(DM)相互作用程度和内禀退相干因素的明显影响；如果系统的初态为纠缠态|ψ(0)〉=a|00〉+b|11〉，系统的纠缠与DM相互作用大小和各向异性参数无关，纠缠程度不仅要受到内禀退相干因素的影响，还会被外加磁场进一步削弱。
量子光学 XXZ海森堡系统 量子纠缠 内禀退相干 动力学
